A MEMS electrochemical bellows actuator for fluid metering applications

A MEMS electrochemical bellows actuator for fluid metering applications.

We present a high efficiency wireless MEMS electrochemical bellows actuator capable of rapid and repeatable delivery of boluses for fluid metering and drug delivery applications. Nafion®-coated Pt electrodes were combined with Parylene bellows filled with DI water to form the electrolysis-based actuator. The performance of actuators with several bellows configurations was compared for a range o...

Rapid fabrication and characterization of MEMS Parylene C bellows for large deflection applications

We present a rapid, high-yield fabrication process for Parylene C microbellows for large deflection applications and their characterization. Bellows having different convolution number, wall thickness, inner diameter and outer diameter and layer height were fabricated using a lost wax-like process. The effect of design parameters on overall bellows performance was evaluated through load–deflect...

A low actuation voltage electrostatic actuator for RF MEMS switch applications

This paper presents the design, fabrication and characterization of an RF MEMS switch. Low actuation voltage and high isolation of the switch were achieved by exploiting buckling and bending effects induced by well-controlled residual stress. The effects of residual stress on improving the switch performance have been investigated using both analytical and numerical methods. The proposed RF swi...

A docking system for microsatellites based on MEMS actuator arrays

Microelectromechanical system (MEMS) technology promises to improve performance of future spacecraft components while reducing mass, cost, and manufacturing time. Arrays of microcilia actuators offer a lightweight alternative to conventional docking systems for miniature satellites. Instead of mechanical guiding structures, such a system uses a surface tiled with MEMS cilia actuators to guide t...

3D Force Control System Design for A Hydraulic Parallel Bellows Continuum Actuator